Nano-Electronics at DIEGM
• In collaboration with:
• EU projects:
– NESTOR, SINANO, PULL-NANO
• Italian projects:
– PRIN (2002, 2004, 2006)
– FIRB
– PNR
Nano-switches in SOI technology
EU projects: NESTOR, SINANO
Modeling of nano-devices
balistic and quasi-balistic transport
Design and Fabrication of nano-devices
EU projects:
• SINANO
• PULL-NANO
Ultra-thin body Silicon On Insulator
nanotransistor SON MOSFET
Poly Si
SiO2
Si3N4
Si epi
80nm
tox = 30 Å
Si channel 20nm
single atoms
Buried dielectrics 20nm
Innovative Non Volatile Memories
based on localized trapping
Electrical Device Characterization
FILMATO
MISURA ?
Italian Universities
Nano-Electronics Team (IU.net)
• A new powerful university consortium to
overcome the fragmentation of nanoelectronics research in Italy
www.iunet.eu
members
Politecnico di
Milano
Università di
Modena
Università di
Pisa
Università di
Udine
Università di
Padova
Università di
Ferrara
Università di
Bologna
Università di Roma
“La Sapienza”
30 staff members, approximately 30 PhD students